A Cellular Automata Based Multi-Process Microfabrication Simulator

نویسندگان
چکیده

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ژورنال

عنوان ژورنال: Journal of Integrated Circuits and Systems

سال: 2011

ISSN: 1872-0234,1807-1953

DOI: 10.29292/jics.v6i2.343